4. Radiation imagery chemistry: process, composition, or product th
  5. Imaging affecting physical property of radiation sensitive...
  6. Making electrical device

Paul Nyhus

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Chromeless phase shift lithography (CPL) masks having...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Lithography masks for improved line-end patterning

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Methods to pattern contacts using chromeless phase shift masks

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
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Negative tone double patterning method

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Use of chromeless phase shift features to pattern large area...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
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Profile ID: LFUS-PAI-P-2969183

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