4. Abrading
  5. Machine
  6. Rotary tool

Paul M. Feeney

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Chemical mechanical polishing slurry and method for...

Compositions – Etching or brightening compositions
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Chemical-mechanical planarization of metallurgy

Compositions – Etching or brightening compositions
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Chemical-mechanical-polishing slurry and method for...

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Composition and method for damascene CMP

Etching a substrate: processes – Mechanically shaping – deforming – or abrading of substrate – Nongaseous phase etching
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Controlled electrochemical polishing method

Electrolysis: processes – compositions used therein – and methods – Electrolytic erosion of a workpiece for shape or surface... – Electrolyte composition or defined electrolyte
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Profile ID: LFUS-PAI-P-1982590

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