Electrolysis: processes – compositions used therein – and methods – Electrolytic erosion of a workpiece for shape or surface... – Electrolyte composition or defined electrolyte
Reexamination Certificate
2011-08-16
2011-08-16
Neckel, Alexa D. (Department: 1723)
Electrolysis: processes, compositions used therein, and methods
Electrolytic erosion of a workpiece for shape or surface...
Electrolyte composition or defined electrolyte
C205S640000
Reexamination Certificate
active
07998335
ABSTRACT:
The invention relates to a method of polishing a substrate comprising at least one metal layer by applying an electrochemical potential between the substrate and at least one electrode in contact with a polishing composition comprising a reducing agent or an oxidizing agent.
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Brusic Vlasta
Feeney Paul M.
Borg-Breen Caryn
Cabot Microelectronics Corporation
Koszyk Frank J.
Neckel Alexa D.
Omholt Thomas E.
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