Controlled electrochemical polishing method

Electrolysis: processes – compositions used therein – and methods – Electrolytic erosion of a workpiece for shape or surface... – Electrolyte composition or defined electrolyte

Reexamination Certificate

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C205S640000

Reexamination Certificate

active

07998335

ABSTRACT:
The invention relates to a method of polishing a substrate comprising at least one metal layer by applying an electrochemical potential between the substrate and at least one electrode in contact with a polishing composition comprising a reducing agent or an oxidizing agent.

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