4. Coating processes
  5. Electrical product produced
  6. Integrated circuit, printed circuit, or circuit board

Patricia B. Smith

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Chemical treatment of low-k dielectric films

Semiconductor device manufacturing: process – Making device or circuit emissive of nonelectrical signal – Passivating of surface
Reexamination Certificate

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Damage-free resist removal process for ultra-low-k processing

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Dry process for post oxide etch residue removal

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Hydrogen passivation of chemical-mechanically polished...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Hydrogen plasma photoresist strip and polymeric residue...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Profile ID: LFUS-PAI-P-97020

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