4. Coating processes
  5. Direct application of electrical, magnetic, wave, or...
  6. Plasma

Pamela Lou

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Method for depositing amorphous silicon thin films onto...

Coating processes – Direct application of electrical – magnetic – wave – or... – Plasma
Reexamination Certificate

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Method for multilayer CVD processing in a single chamber

Coating processes – Coating by vapor – gas – or smoke – Base includes an inorganic compound containing silicon or...
Reexamination Certificate

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Plasma CVD of silicon nitride thin films on large area glass sub

Coating processes – Direct application of electrical – magnetic – wave – or... – Plasma
Patent

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Profile ID: LFUS-PAI-P-1270217

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