4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Norman Chen

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Immersion lithography process and mask layer structure...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Forming nonplanar surface
Reexamination Certificate

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Top patterned hardmask and method for patterning

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Utilization of electric field with isotropic development in...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Forming nonplanar surface
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2421580

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