4. Chemistry: electrical and wave energy
  5. Apparatus
  6. Coating, forming or etching by sputtering

Noritaka Akita

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Apparatus for forming a thin film by plasma chemical vapor...

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Crystallization apparatus and crystallization method

Single-crystal – oriented-crystal – and epitaxy growth processes; – Apparatus – With means for measuring – testing – or sensing
Reexamination Certificate

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Crystallization apparatus and crystallization method

Single-crystal – oriented-crystal – and epitaxy growth processes; – Apparatus – With means for measuring – testing – or sensing
Reexamination Certificate

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Crystallization apparatus and method; manufacturing method...

Single-crystal – oriented-crystal – and epitaxy growth processes; – Apparatus
Reexamination Certificate

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Crystallization apparatus and method; manufacturing method...

Single-crystal – oriented-crystal – and epitaxy growth processes; – Apparatus
Reexamination Certificate

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Profile ID: LFUS-PAI-P-747476

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