Crystallization apparatus and crystallization method

Details Crystallization apparatus and crystallization method Crystallization apparatus and crystallization method

2011-06-21

2011-06-21

Kunemund, Robert M (Department: 1714)

Single-crystal, oriented-crystal, and epitaxy growth processes;

Apparatus

With means for measuring, testing, or sensing

C117S202000, C117S041000, C117S042000

Reexamination Certificate

active

07964035

ABSTRACT:
A crystallization apparatus is provided. The crystallization apparatus includes a visible light source capable of obtaining high energy density output therein. A visible light irradiation system is formed by a plurality of visible laser beam sources arranged in a two-dimensional array. The visible light irradiation system includes a light intensity distribution forming apparatus for patterning light intensity distribution of a plurality of visible laser beams emitted by each visible laser beam source, and an imaging optical system for imaging the light having the light intensity distribution patterned by the light intensity distribution forming apparatus onto an irradiated region on the processed substrate. The visible laser beams emitted by a plurality of solid lasers or semiconductor lasers are overlapped in the light intensity distribution forming apparatus that satisfies an imaging position relationship in an optical axis with respect to the processed substrate.

REFERENCES:
patent: 2005/0266591 (2005-12-01), Hideo
patent: 2006/0087922 (2006-04-01), Cheong et al.
patent: 1497684 (2004-05-01), None
patent: 1691278 (2005-11-01), None
patent: 2000-068520 (2000-03-01), None
patent: 2002-261015 (2002-09-01), None
patent: 2005-294801 (2005-10-01), None
patent: 2006-066462 (2006-03-01), None

Affiliated with

Also associated with

Rating

Crystallization apparatus and crystallization method does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Crystallization apparatus and crystallization method, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Crystallization apparatus and crystallization method will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2658668