4. Semiconductor device manufacturing: process
  5. Gettering of substrate
  6. By layers which are coated, contacted, or diffused

Norihiro Kobayashi

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Annealed wafer manufacturing method and annealed wafer

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Heat treatment jig for semiconductor wafers and a method for tre

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
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Heat treatment method for a silicon monocrystal wafer and a...

Single-crystal – oriented-crystal – and epitaxy growth processes; – Processes of growth with a subsequent step of heat treating...
Reexamination Certificate

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Heat treatment method for a silicon wafer and a silicon...

Semiconductor device manufacturing: process – Radiation or energy treatment modifying properties of...
Reexamination Certificate

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Heat treatment method for a silicon wafer and a silicon...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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