4. Radiant energy
  5. Irradiation of objects or material
  6. Irradiation of semiconductor devices

Norbert R. Bowering

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Alternative fuels for EUV light source

Radiant energy – Radiant energy generation and sources – With radiation modifying member
Reexamination Certificate

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EUV light source

Radiant energy – Radiant energy generation and sources – With radiation modifying member
Reexamination Certificate

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EUV light source components and methods for producing, using...

Radiant energy – Invisible radiant energy responsive electric signalling – Ultraviolet light responsive means
Reexamination Certificate

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EUV light source optical elements

Radiant energy – Radiant energy generation and sources – With radiation modifying member
Reexamination Certificate

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EUV optics

Optical: systems and elements – Having significant infrared or ultraviolet property – Multilayer filter or multilayer reflector
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Profile ID: LFUS-PAI-P-2260597

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