Radiant energy – Invisible radiant energy responsive electric signalling – Ultraviolet light responsive means
Reexamination Certificate
2011-06-14
2011-06-14
Porta, David P (Department: 2884)
Radiant energy
Invisible radiant energy responsive electric signalling
Ultraviolet light responsive means
C356S237200, C356S237300
Reexamination Certificate
active
07960701
ABSTRACT:
A method is disclosed for in-situ monitoring of an EUV mirror to determine a degree of optical degradation. The method may comprise the steps/acts of irradiating at least a portion of the mirror with light having a wavelength outside the EUV spectrum, measuring at least a portion of the light after the light has reflected from the mirror, and using the measurement and a pre-determined relationship between mirror degradation and light reflectivity to estimate a degree of multi-layer mirror degradation. Also disclosed is a method for preparing a near-normal incidence, EUV mirror which may comprise the steps/acts of providing a metallic substrate, diamond turning a surface of the substrate, depositing at least one intermediate material overlying the surface using a physical vapor deposition technique, and depositing a multi-layer mirror coating overlying the intermediate material.
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Bowering Norbert R.
Khodykin Oleh V.
Cymer Inc.
Malevic Djura
Porta David P
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