EUV light source optical elements

Details EUV light source optical elements EUV light source optical elements

2007-03-20

2007-03-20

Wells, Nikita (Department: 2881)

Radiant energy

Radiant energy generation and sources

With radiation modifying member

C250S493100, C378S034000, C378S119000, C438S095000, C438S736000, C359S357000, C359S359000, C359S360000, C359S361000

Reexamination Certificate

active

11021261

ABSTRACT:
Apparatus and methods are disclosed for forming plasma generated EUV light source optical elements, e.g., reflectors comprising MLM stacks employing various binary layer materials and capping layer(s) including single and binary capping layers for utilization in plasma generated EUV light source chambers, particularly where the plasma source material is reactive with one or more of the MLM materials.

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