Ion-producing apparatus

Details Ion-producing apparatus Ion-producing apparatus

1987-05-27

1988-06-07

Moore, David K.

Electric lamp and discharge devices: systems

Discharge device load with fluent material supply to the...

Electron or ion source

313230, 31323141, 3133591, 3133601, 3133621, 313161, 250423R, 250427, 31511131, G01T 120, H01J 2700

Patent

active

047499125

ABSTRACT:
An ion-producing apparatus comprises an electron-producing vessel having an electron-producing chamber, an ion-producing vessel having an ion-producing chamber communicating with the electron-producing chamber, a cathode provided at one end of the electron-producing vessel, an accelerating electrode provided within the ion-producing chamber, for allowing passage of electrons, an anode provided between the cathode and the accelerating electrode, and a power supply circuit for providing a potential difference between the cathode and the anode, thereby to produce electrons in the gap between the cathode and the anode. A vacuum pump is provided for evacuating gas from the ion-producing chamber. A partition is provided within the electron-producing vessel, between the cathode and the anode to divide the electron-producing vessel into a cathode-side chamber and an anode-side chamber, and hinders a gas flow from the cathode-side chamber to the anode-side chamber to apply a pressure difference between both chambers.

REFERENCES:
patent: 3924134 (1975-12-01), Uman et al.
patent: 4691109 (1987-09-01), Magee et al.
"Preprint of 46th Applied Physics Institute" (Gakkai), 1985.
"Research Report-Institute of Plasma Physics Nogoya University", Electron Temperature Effects for an Ion Beam Source, Joshin Uramoto, 5/79.

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