Thermal measuring and testing – Temperature measurement – In spaced noncontact relationship to specimen
Reexamination Certificate
2005-08-04
2008-08-26
Verbitsky, Gail (Department: 2855)
Thermal measuring and testing
Temperature measurement
In spaced noncontact relationship to specimen
C374S004000, C374S007000, C374S130000, C374S161000
Reexamination Certificate
active
07416330
ABSTRACT:
The temperature of the surface and/or inside of a substrate is measured by irradiating the front surface or rear surface of the substrate, whose temperature is to be measured, with light and measuring the interference of a reflected light from the substrate and a reference light. A method and apparatus for measuring temperature or thickness which is suitable for directly measuring the temperature of the outermost surface layer of a substrate, and an apparatus for treating a substrate for an electronic device, which uses such method, are provided.
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Ishii Nobuo
Ito Masafumi
Koshimizu Chishio
Okamura Yasuyuki
Shiina Tatsuo
Ito Masafumi
Oblon & Spivak, McClelland, Maier & Neustadt P.C.
Tokyo Electron Limited
Verbitsky Gail
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