Method and apparatus for measuring temperature of substrate

Thermal measuring and testing – Temperature measurement – In spaced noncontact relationship to specimen

Reexamination Certificate

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Details

C374S004000, C374S007000, C374S130000, C374S161000

Reexamination Certificate

active

07416330

ABSTRACT:
The temperature of the surface and/or inside of a substrate is measured by irradiating the front surface or rear surface of the substrate, whose temperature is to be measured, with light and measuring the interference of a reflected light from the substrate and a reference light. A method and apparatus for measuring temperature or thickness which is suitable for directly measuring the temperature of the outermost surface layer of a substrate, and an apparatus for treating a substrate for an electronic device, which uses such method, are provided.

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