4. Semiconductor device manufacturing: process
  5. Coating of substrate containing semiconductor region or of...
  6. Multiple layers

Nitin K. Ingle

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Chemical vapor deposition of high quality flow-like silicon...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Gap-fill depositions in the formation of silicon containing...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Limited thermal budget formation of PMD layers

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
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Method and system for in-situ cleaning of semiconductor...

Cleaning and liquid contact with solids – Processes – Using sequentially applied treating agents
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Method using TEOS ramp-up during TEOS/ozone CVD for improved...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2229897

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