4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Nicolas Bright

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Apparatus and methods for controlling wafer temperature in...

Semiconductor device manufacturing: process – Including control responsive to sensed condition – Optical characteristic sensed
Reexamination Certificate

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Apparatus for controlling wafer temperature in chemical...

Abrading – Precision device or process - or with condition responsive... – Controlling temperature
Reexamination Certificate

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Apparatus methods for controlling wafer temperature in...

Abrading – Precision device or process - or with condition responsive... – Computer controlled
Reexamination Certificate

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Automatic dynamic baseline creation and adjustment

Data processing: measuring – calibrating – or testing – Measurement system in a specific environment – Mechanical measurement system
Reexamination Certificate

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Method and apparatus for controlling the volume of a plasma

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
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Profile ID: LFUS-PAI-P-2130955

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