4. Semiconductor device manufacturing: process
  5. Formation of electrically isolated lateral semiconductive...
  6. Having air-gap dielectric

Nicholas C. M. Fuller

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De-fluorination of wafer surface and related structure

Semiconductor device manufacturing: process – Gettering of substrate – By vapor phase surface reaction
Reexamination Certificate

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Gate patterning of nano-channel devices

Semiconductor device manufacturing: process – Chemical etching – Liquid phase etching
Reexamination Certificate

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High ion energy and reative species partial pressure plasma...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Multilayer hardmask scheme for damage-free dual damascene...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Multilayer hardmask scheme for damage-free dual damascene...

Stock material or miscellaneous articles – Composite – Of silicon containing
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Profile ID: LFUS-PAI-P-2298340

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