4. Semiconductor device manufacturing: process
  5. Bonding of plural semiconductor substrates

Nathan W. Cheung

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Cleaved silicon thin film with rough surface

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
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Controlled cleaning process

Semiconductor device manufacturing: process – Bonding of plural semiconductor substrates – Subsequent separation into plural bodies
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Controlled cleavage process and device for patterned films...

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Ion implantation of dopant into semiconductor region
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Controlled cleavage process and device for patterned films...

Semiconductor device manufacturing: process – Bonding of plural semiconductor substrates – Subsequent separation into plural bodies
Reexamination Certificate

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Controlled cleavage process and resulting device using beta anne

Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate
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Profile ID: LFUS-PAI-P-392020

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