4. Abrading
  5. Abrading process
  6. Utilizing fluent abradant

Nathan Cheung

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Cluster tool apparatus using plasma immersion ion implantation

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Reexamination Certificate

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Cluster tool method using plasma immersion ion implantation

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Clustertool system software using plasma immersion ion...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate

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Controlled cleavage process and device for patterned films

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Ion implantation of dopant into semiconductor region
Patent

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Controlled cleavage process and device for patterned films

Semiconductor device manufacturing: process – Bonding of plural semiconductor substrates – Thinning of semiconductor substrate
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1127880

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