4. Fishing, trapping, and vermin destroying

Narayanan Meyyappan

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Method of forming ultra shallow junctions

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Method of forming ultra shallow junctions

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Ion implantation of dopant into semiconductor region
Reexamination Certificate

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Method of treating silicon to obtain thin, buried insulating lay

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Shallow SIMOX processing method using molecular ion implantation

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Profile ID: LFUS-PAI-P-954058

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