4. Scanning-probe techniques or apparatus; applications of scanning
  5. General aspects of spm probes, their manufacture, or their...
  6. Probe holders

NanoWorld AG

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Micro device and process for producing it

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
Reexamination Certificate

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SPM probe with shortened cantilever

Scanning-probe techniques or apparatus; applications of scanning – General aspects of spm probes – their manufacture – or their... – Probe holders
Reexamination Certificate

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SPM sensor and process for producing it

Etching a substrate: processes – Forming or treating an article whose final configuration has...
Reexamination Certificate

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