Scanning-probe techniques or apparatus; applications of scanning – General aspects of spm probes – their manufacture – or their... – Probe holders
Reexamination Certificate
2011-08-30
2011-08-30
Kim, Robert (Department: 2881)
Scanning-probe techniques or apparatus; applications of scanning
General aspects of spm probes, their manufacture, or their...
Probe holders
C850S052000, C850S056000, C850S057000, C850S060000, C250S306000, C250S307000, C073S105000
Reexamination Certificate
active
08011016
ABSTRACT:
An SPM probe with an elongated support element and a cantilever projecting beyond the front face of the support element and carrying a scanning tip, with the cantilever arranged at a front face side of the support element of the probe, protruding there from a front face side flank, and with the support element having an essentially trapezoidal cross-section with a longer and a shorter transverse edge at the face side flank, and also with critical corners at one of the transverse edges of the face side flank that are closest to a sample during the scanning process, wherein the support element has an elongated raised portion extending in the longitudinal direction of the support element and of the cantilever, with the raised portion having an essentially trapezoidal cross-section, and with the cantilever arranged on the face side on a narrow transverse edge of the raised portion of the support element, and with the raised portion with the cantilever arranged preferably at the longer transverse edge of the face side flank of the support element, and with the plane extending between the scanning tip and a theoretical straight line passing through one of the critical corners, parallel to the lateral longitudinal edges of the underside of the support element, forming an angle of tilt of at least 5 degrees relative to the transverse edge.
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patent: 2008/0210864 (2008-09-01), Paget et al.
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patent: 8-262040 (1996-10-01), None
patent: 10-307144 (1998-11-01), None
patent: 10307144 (1998-11-01), None
Richter Christoph
Sulzbach Thomas
Kim Robert
Logie Michael
NanoWorld AG
Renner , Otto, Boisselle & Sklar, LLP
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