4. Coating apparatus
  5. Gas or vapor deposition
  6. Multizone chamber

Mun Cheol Baek

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Effusion cell assembly for epitaxial apparatus

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Highly integrated multicolor light emitting device and a method

Semiconductor device manufacturing: process – Making device or circuit emissive of nonelectrical signal – Packaging or treatment of packaged semiconductor
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Short-wavelength optoelectronic device including field emission

Etching a substrate: processes – Forming or treating optical article
Patent

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Profile ID: LFUS-PAI-P-446200

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