4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Mu-Tsang Lin

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Apparatus and method for reducing contamination in a wafer...

Classifying – separating – and assorting solids – Sifting – Special applications
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Automatic statistical process control (SPC) chart generation...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
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Direct detection of dielectric etch system magnet driver and...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With measuring – sensing – detection or process control means
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Exhaust adaptor and method for chamber de-gassing

Fluid handling – Processes – Cleaning – repairing – or assembling
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Fault detection and classification (FDC) specification...

Data processing: measuring – calibrating – or testing – Measurement system – Statistical measurement
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Profile ID: LFUS-PAI-P-2449676

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