Fluid handling – Processes – Cleaning – repairing – or assembling
Reexamination Certificate
2005-07-26
2005-07-26
Lee, Kevin (Department: 3753)
Fluid handling
Processes
Cleaning, repairing, or assembling
C137S238000, C134S001300, C134S021000, C438S905000, C156S345290
Reexamination Certificate
active
06920891
ABSTRACT:
An exhaust adaptor and method which includes attachment of an exhaust bellow or conduit to a process chamber to facilitate vacuum-induced evacuation of residual toxic gases from the chamber during cleaning and/or maintenance of the chamber. A throttle valve of the chamber is first removed from a throttle valve housing, and one end of the exhaust adaptor is next attached to the throttle valve housing. An exhaust bellow or conduit is attached to the opposite end of the adaptor. As a down flow of air is directed into the open chamber, vacuum pressure is induced in the chamber interior through the exhaust bellow or conduit, the adaptor and the valve housing, respectively. Air disturbances in the chamber interior are thus eliminated, and toxic residual gases generated in the chamber interior are therefore incapable of diffusing to the exterior of the chamber.
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Lee Cherng-Chang
Lee Yen-Chan
Lin Mu-Tsang
Liu Chia-Hsin
Tsai Wie-Liang
Lee Kevin
Tung & Associates
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