Fault detection and classification (FDC) specification...

Data processing: measuring – calibrating – or testing – Measurement system – Statistical measurement

Reexamination Certificate

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C700S108000

Reexamination Certificate

active

10947092

ABSTRACT:
An apparatus for fault detection and classification (FDC) specification management including a storage device and a process module. The storage device stores a specification management record and a chart profile record. The specification management record stores statistical algorithm settings of a parameter and the chart profile record stores chart frame and alarm condition information. The process module, which resides in a memory, receives a manipulation message corresponding to the specification management record, and accordingly manipulates the chart profile record.

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Goodlin et al., Simultaneous Fault Detection and classification for Semiconductor Manufacturing Tools, 2003, Journal of The Electrochemical Society, 150 (12), pp. G778-G784.
Wu et al., Fault detection and Classification of Plasma CVD Tool, 2003 IEEE, pp. 123-125.

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