Automatic statistical process control (SPC) chart generation...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing

Reexamination Certificate

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Details

C700S051000, C700S110000, C700S121000, C702S182000

Reexamination Certificate

active

07117058

ABSTRACT:
A system and method for automatic SPC chart generation including a storage device and a data acquisition module. The storage device stores a chamber management tree, a recipe window management tree, a parameter configuration table and multiple chart profile records. The data acquisition module, which resides in a memory, acquires multiple process events and parameter values corresponding to the process events and a process parameter, selects a relevant statistical algorithm, calculates a statistical value by applying the statistical algorithm to the parameter values, creates a new chart profile record and a parameter statistics record therein if the chart profile record is absent, and stores the statistical values and measured time in the parameter statistics record.

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patent: 2005/0015176 (2005-01-01), Harada et al.
patent: 2005/0021534 (2005-01-01), Cheng et al.
patent: 2005/0038543 (2005-02-01), Lin et al.

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