Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2006-10-03
2006-10-03
Picard, Leo (Department: 2125)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
C700S051000, C700S110000, C700S121000, C702S182000
Reexamination Certificate
active
07117058
ABSTRACT:
A system and method for automatic SPC chart generation including a storage device and a data acquisition module. The storage device stores a chamber management tree, a recipe window management tree, a parameter configuration table and multiple chart profile records. The data acquisition module, which resides in a memory, acquires multiple process events and parameter values corresponding to the process events and a process parameter, selects a relevant statistical algorithm, calculates a statistical value by applying the statistical algorithm to the parameter values, creates a new chart profile record and a parameter statistics record therein if the chart profile record is absent, and stores the statistical values and measured time in the parameter statistics record.
REFERENCES:
patent: 6646660 (2003-11-01), Patty
patent: 6727106 (2004-04-01), Ankutse et al.
patent: 6970758 (2005-11-01), Shi et al.
patent: 2005/0015176 (2005-01-01), Harada et al.
patent: 2005/0021534 (2005-01-01), Cheng et al.
patent: 2005/0038543 (2005-02-01), Lin et al.
Chen Chin-Chih
Chen Jian-Hong
Chien Wen-Sheng
Chu Chon-Hwa
Fang Joseph W. L.
Kosowski Alexander
Picard Leo
Thomas Kayden Horstemeyer & Risley
LandOfFree
Automatic statistical process control (SPC) chart generation... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Automatic statistical process control (SPC) chart generation..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Automatic statistical process control (SPC) chart generation... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3719415