4. Etching a substrate: processes
  5. Gas phase etching of substrate
  6. Application of energy to the gaseous etchant or to the...

Miwako Nakahara

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Manufacturing method of semiconductor integrated circuit device

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Method for manufacturing semiconductor device having an...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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MOS transistor apparatus and method of manufacturing same

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
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MOS transistor apparatus and method of manufacturing same

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Process for manufacturing thin film transistor on unannealed...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – On insulating substrate or layer
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Profile ID: LFUS-PAI-P-2570374

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