4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Liquid phase etching

Mitsushi Itano

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Cleaning agents and cleaning method

Cleaning compositions for solid surfaces – auxiliary compositions – Cleaning compositions or processes of preparing – For cleaning a specific substrate or removing a specific...
Patent

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Detergent composition

Cleaning compositions for solid surfaces – auxiliary compositions – Cleaning compositions or processes of preparing – For cleaning a specific substrate or removing a specific...
Reexamination Certificate

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Dry etching gas and method for dry etching

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
Reexamination Certificate

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Etching solution, etched article and method for etched article

Compositions – Etching or brightening compositions
Reexamination Certificate

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Etching solution, etched article and method for etched article

Etching a substrate: processes – Nongaseous phase etching of substrate – Etching inorganic substrate
Reexamination Certificate

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Profile ID: LFUS-PAI-P-392416

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