Compositions – Etching or brightening compositions
Reexamination Certificate
2006-05-30
2006-05-30
Goudreau, George A. (Department: 1763)
Compositions
Etching or brightening compositions
C252S079200, C252S079300, C252S079400
Reexamination Certificate
active
07052627
ABSTRACT:
An etching solution which exhibits etching rates for both of a thermally oxidized film (THOX) and a boron-phosphorus-glass film (BPSG) of 100 Å/min or less at 25° C., and an etching rate ratio: etching rate for BPSG/etching rate for a thermally oxidized film (THOX) of 1.5 or less.
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Itano Mitsushi
Kezuka Takehiko
Suyama Makoto
Daikin Industries Ltd.
Goudreau George A.
Schulman B. Aaron
Stites & Harbison PLLC
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