4. Abrading
  5. Abrading process
  6. Utilizing fluent abradant

Mitsunari Satake

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Apparatus for holding substrate to be polished

Abrading – Work holder – Vacuum
Patent

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Method for fabricating a semi-conductor device having a...

Semiconductor device manufacturing: process – Chemical etching – Altering etchability of substrate region by compositional or...
Reexamination Certificate

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Method for forming buried interconnect

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Polishing method and polishing apparatus

Abrading – Abrading process – Utilizing fluent abradant
Patent

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Profile ID: LFUS-PAI-P-1477546

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