4. Coating processes
  5. With post-treatment of coating or coating material
  6. Heating or drying

Mitsuaki Minato

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Coaxial plasma processing apparatus

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Coaxial plasma processing apparatus

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Patent

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Equipment for thermal stabilization process of photoresist patte

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Patent

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Liquid compositions for forming silica coating films

Coating processes – With post-treatment of coating or coating material – Heating or drying
Patent

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Method of and apparatus for processing a workpiece in plasma

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent

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Profile ID: LFUS-PAI-P-358887

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