4. Coating apparatus
  5. Gas or vapor deposition
  6. With treating means

Mitsuaki Komino

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Drying processing method and apparatus using same

Drying and gas or vapor contact with solids – Process – Diverse types of drying operations
Patent

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Electrode, susceptor, plasma processing apparatus and method...

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Electrostatic chuck

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent

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Method and device for controlling pressure and flow rate

Drying and gas or vapor contact with solids – Process – Gas or vapor contact with treated material
Patent

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Method and system for controlling gas system

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Patent

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Profile ID: LFUS-PAI-P-150119

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