Electrostatic chuck

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field

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H02N 1300

Patent

active

056255268

ABSTRACT:
An electrostatic chuck of this invention includes a conductive film, an insulating coat formed on a susceptor to cover the conductive film, and a feeder circuit for applying a voltage to the conductive film to cause the insulating coat to generate an electrostatic attractive force. The feeder circuit includes a connecting conductor replacing a portion of the insulating coat to be electrically connected to the conductive film, a first feeder pin extending through the susceptor from its front surface side to its rear surface side and having one end portion electrically connected to the connecting conductor, an insulating member for insulating the first feeder pin from the susceptor, a second feeder pin having one end portion pressed against the other end portion of the first feeder pin to be electrically connected to the first feeder pin, and a power supply electrically connected to the second feeder pin.

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Larry D. Hartsough, "Electrostatic Wafer Holding", Solding State Technology, Jan. 1993, pp. 87-90.
C. Balakrishnan, "Johnsen-Rahbek Effect with an Electronic Semi-Conductor", British Journal of Applied Physics, pp. 211-213 Aug. 1950.
Alfred Johnsen & Knud Rahbek, "A Physical Phenomenon and Its Applications to Telegraphy, Telephony, etc.", I.E.E. Journal, vol. 61, Jul. 1923, pp. 713-725.

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