4. Semiconductor device manufacturing: process
  5. Coating with electrically or thermally conductive material
  6. To form ohmic contact to semiconductive material

Ming Huan Tsai

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Bi-layer photoresist dry development and reactive ion etch...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
Reexamination Certificate

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Bi-layer photoresist dry development and reactive ion etch...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
Reexamination Certificate

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Bi-level resist structure and fabrication method for contact...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Borderless contact with buffer layer

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Method for forming novel BARC open for precision critical...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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