4. Coating apparatus
  5. Gas or vapor deposition
  6. With treating means

Michiko Okubo

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Method of processing a magnetic thin film

Etching a substrate: processes – Forming or treating article containing magnetically...
Patent

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Plasma discharge generating antenna

Coating apparatus – Gas or vapor deposition – With treating means
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Sputtering apparatus and sputtering method

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Profile ID: LFUS-PAI-P-1504196

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