4. Semiconductor device manufacturing: process
  5. Coating with electrically or thermally conductive material
  6. Insulated gate formation

Michelle T. Schulberg

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Dielectric films with low dielectric constants

Stock material or miscellaneous articles – Composite – Of silicon containing
Reexamination Certificate

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Method of porogen removal from porous low-k films using UV...

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Total dielectric isolation
Reexamination Certificate

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Method to deposit SiOCH films with dielectric constant below...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
Reexamination Certificate

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Plasma detemplating and silanol capping of porous dielectric...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Combined with the removal of material by nonchemical means
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Profile ID: LFUS-PAI-P-2433994

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