4. Measuring and testing
  5. Speed, velocity, or acceleration
  6. Acceleration determination utilizing inertial element

Michael W. Judy

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Apparatus and method for anchoring micromachined structures

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Reexamination Certificate

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Apparatus and method for multi-axis capacitive sensing

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Patent

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Apparatus and method for multi-axis capacitive sensing

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Patent

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Apparatus and method of forming a device layer

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Bonded wafer optical MEMS process

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
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Profile ID: LFUS-PAI-P-525272

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