4. Electricity: electrical systems and devices
  5. Electric charge generating or conducting means
  6. Use of forces of electric charge or field

Michael Sogard

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Autofocus methods and devices for lithography

Photocopying – Projection printing and copying cameras – Focus or magnification control
Reexamination Certificate

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Autofocus methods and devices for lithography

Photocopying – Projection printing and copying cameras – Focus or magnification control
Reexamination Certificate

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Containment system for immersion fluid in an immersion...

Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate

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Cooling assembly for a stage

Photocopying – Projection printing and copying cameras – Detailed holder for photosensitive paper
Reexamination Certificate

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Deformable mirror actuation system

Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2064757

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