Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate
2006-01-24
2006-01-24
Thompson, Timothy (Department: 2873)
Optical: systems and elements
Optical modulator
Light wave temporal modulation
C359S290000, C359S224200, C359S223100, C359S578000
Reexamination Certificate
active
06989922
ABSTRACT:
Mechanical control and actuation of an adaptive optical element provides highly stable and repeatable correction of the shape of an optical element to an accuracy of a small fraction of a very short wavelength of light, responsive to a metrology source and sensor arrangement. Actuators in the form of individual set-screws or other actuators capable of axially positioning a shaft are driven by a robotic screw driver with four degrees of freedom or one or more linear actuators to exert force on the mirror. Positive or negative force may be used for outward and/or inward deflection of the mirror. When a desired force is developed on the mirror through a mechanical linkage, the linkage may be clamped by a passive clamp which may be released by an actuator such that the adjustment is maintained while the linear actuator and the clamp actuator are turned off; yielding a highly stable adjustment while effectively removing sources of actuator drift, noise, vibration and heating which may adversely affect stability.
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Phillips Alton
Sogard Michael
Nikon Corporation
Thompson Timothy
Whitham Curtis & Christofferson, P.C.
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