Cooling assembly for a stage

Details Cooling assembly for a stage Cooling assembly for a stage

2004-09-04

2009-06-16

Kim, Peter B (Department: 2851)

Photocopying

Projection printing and copying cameras

Detailed holder for photosensitive paper

C355S075000

Reexamination Certificate

active

07548303

ABSTRACT:
A stage assembly (218) for positioning a work piece (30) includes a stage (238), a heat transfer region (246), a stage mover assembly (240), and an environmental system (226). The stage (238) retains the work piece (30). The heat transfer region (246) is positioned near the stage (238). The stage mover assembly (240) moves the stage (238) relative to the heat transfer region (246). The environmental system (226) directly controls the temperature of the heat transfer region (246). For example, the environmental system (226) can circulate a circulation fluid near the heat transfer region (246). A bearing (254B) can maintain the stage (238) spaced apart from the heat transfer region (246).

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