Single-crystal, oriented-crystal, and epitaxy growth processes;
Forming from vapor or gaseous state
With decomposition of a precursor
Inventor
active
Method for depositing a coating having a relatively high...
Method for forming hemispherical grained silicon
Method of forming hemispherical grained silicon
Method of forming polysilicon having a desired surface roughness
Method of forming polysilicon having a desired surface roughness
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