Coating apparatus
Gas or vapor deposition
Multizone chamber
Inventor
active
Adhesion promotion for etch by-products
Load lock design for rapid wafer heating
Method and apparatus for monitoring and/or end point...
Pedestal heat transfer and temperature control
Single wafer load lock chamber for pre-processing and...
No associations
LandOfFree
Michael Rivkin does not yet have a rating. At this time, there are no reviews or comments for this inventor.
If you have personal experience with Michael Rivkin, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Michael Rivkin will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-P-2085091