Electric resistance heating devices – Heating devices – Radiant heater
Reexamination Certificate
2011-05-10
2011-05-10
Robinson, Daniel (Department: 3742)
Electric resistance heating devices
Heating devices
Radiant heater
C118S724000
Reexamination Certificate
active
07941039
ABSTRACT:
Provided herein are assemblies that, when coupled to an object, are capable of keeping the object at a uniform elevated temperature while removing large amounts of heat from an external source. Applications include various integrated circuit fabrication processes that use such external sources to expose wafers to radiation. In certain embodiments, the assemblies include a pedestal for supporting the wafer or other object. In certain embodiments, the assemblies include a calibrated heat resistance that allows heat be conducted away from the pedestal and wafer to maintain the desired set-point temperature. In certain embodiments, the pedestal may have one or more protrusions used to dissipate or transfer heat from the pedestal to a heat sink. Also, in certain embodiments, the pedestal surface is configured to have a spectral reflectivity of desired values in such way as to reflect the wavelengths that are emitted by an external radiant heat source.
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Gentile Stephen V.
Kamian George
Rivkin Michael
Roham Sassan
Shrinivasan Krishnan
Novellus Systems Inc.
Robinson Daniel
Weaver Austin Villeneuve & Sampson LLP
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