4. Etching a substrate: processes
  5. Gas phase etching of substrate
  6. Application of energy to the gaseous etchant or to the...

Michael Rice

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Apparatus and method for attaining repeatable temperature versus

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
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Clamp ring for domed pedestal in wafer processing chamber

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Patent

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Cluster tool architecture for processing a substrate

Data processing: generic control systems or specific application – Specific application – apparatus or process – Article handling
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Cluster tool architecture for processing a substrate

Coating apparatus – Work holders – or handling devices – Gripper or clamped work type
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Enhancement of silicon oxide etch rate and nitride...

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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