4. Optics: measuring and testing
  5. By dispersed light spectroscopy
  6. Utilizing a spectrometer

Michael N. Grimbergen

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Chamber having improved process monitoring window

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Chamber having process monitoring window

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With measuring – sensing – detection or process control means
Reexamination Certificate

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Endpoint detection for semiconductor processes

Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
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Endpoint detection in the fabrication of electronic devices

Semiconductor device manufacturing: process – Including control responsive to sensed condition – Optical characteristic sensed
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Mask etch plasma reactor with cathode providing a uniform...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With workpiece support
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Profile ID: LFUS-PAI-P-1674400

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