4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Combined with coating step

Michael D. Armacost

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Airgap for semiconductor devices

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Corner protected shallow trench isolation device

Active solid-state devices (e.g. – transistors – solid-state diode – Integrated circuit structure with electrically isolated... – Including dielectric isolation means
Patent

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Dielectric materials to prevent photoresist poisoning

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Etch depth control for dual damascene fabrication process

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
Reexamination Certificate

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Fine-pitch device lithography using a sacrificial hardmask

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Profile ID: LFUS-PAI-P-552455

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