4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Combined with coating step

Michael C. Triplett

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Gas chemistry for improved in-situ cleaning of residue for a CVD

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
Patent

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Gate stacks

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Gate stacks

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Reexamination Certificate

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Gate stacks

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Reexamination Certificate

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Incorporation of an impurity into a thin film

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into...
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1209352

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