Semiconductor device manufacturing: process
Coating with electrically or thermally conductive material
To form ohmic contact to semiconductive material
Inventor
active
Substrate having uniform tungsten silicide film and method of ma
Uniform tungsten silicide films produced by chemical vapor depos
Utilization of SiH.sub.4 soak and purge in deposition processes
Utilization of SiH4 soak and purge in deposition processes
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