4. Coating apparatus
  5. Gas or vapor deposition
  6. With treating means

Matthew M. Besen

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Fluid-cooled dielectric window for a plasma system

Electric lamp and discharge devices: systems – Combined load device or load device temperature modifying... – Distributed parameter resonator-type magnetron
Patent

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Inductively-driven light source for lithography

Radiant energy – Radiant energy generation and sources – With radiation modifying member
Reexamination Certificate

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Inductively-driven light source for microscopy

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating
Reexamination Certificate

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Inductively-driven plasma light source

Electric lamp and discharge devices – With temperature modifier – Hollow electrode or lead
Reexamination Certificate

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Inductively-driven plasma light source

Electric heating – Metal heating – By arc
Reexamination Certificate

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Profile ID: LFUS-PAI-P-635997

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